Mems process for optical attenuators

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The MEMS attenuator design achieves highly repeatable optical attenuation over C and/or L bands through a thermally-actuated reflective vane that intercepts light. Applications in broadband optical fiber communication system need variable optical attenuators (VOAs) with low wavelength-dependent loss (WDL). Based on analysis on the dispersion of the optical system of a MEMS-based VOA, we provide a method to reduce the WDL significantly with minor revision on. The PM MEMS chip consists of an electrically movable mirror on a silicon support. These products provide the basis for spectrally efficient DWDM transmission utilizing dispersion tolerant modulation, channel monitoring, wavelength switching, remote power control and. The components are characterized with low nsertion loss, fast response and compact size.

US6275320B1

To date, however, MEMS activated variable optical attenuators are not available, at least not commercially, even though such MEMS variable optical attenuators will likely be instrumental in

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MEMS OPTICAL ATTENUATOR

The PM MEMS chip consists of an electrically movable mirror on a silicon support. A voltage applied to the PM MEMS chip causes the mirror to rotate, which changes the coupling of light between the

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MEMS Variable Optical Attenuators

Lumentum microelectromechanical systems (MEMS) variable optical attenuators (MATT) focus on key network optical power management applications. Lumentum offers MEMS attenuators in normally

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AC Photonics Inc

Optical attenuators reduce the intensity of transmitted light uniformly across the spectrum. Applications include preventing too much light from overloading a

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